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发明名称
METHOD OF OPTIMISING THE SENSITIVITY OF A SURFACE PLASMON ELLIPSOMETRY APPARATUS
摘要
申请公布号
EP2205959(A1)
申请公布日期
2010.07.14
申请号
EP20080806808
申请日期
2008.10.27
申请人
ATTOMARKER LIMITED
发明人
HOOPER, IAN RICHARD;SAMBLES, JOHN ROY;STEWART, CIARAN EOIN
分类号
G01N21/21;G01N21/55
主分类号
G01N21/21
代理机构
代理人
主权项
地址
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