发明名称 METHOD FOR MANUFACTURING GLASS CLICHE USING LASER ETCHING AND APPARATUS FOR LASER IRRADIATION THEREOF
摘要 A method for manufacturing a glass cliché using laser etching includes a dipping step for dipping a glass cliché, which will be etched, into an etching solution, a patterning step for irradiating laser to the glass cliché dipped in the etching solution to form a pattern therein, and a washing step for washing the patterned glass cliché. This method allows making a cliché with a high aspect ratio and fine line widths in comparison to a conventional cliché manufacturing method using photoresist for etching, and also ensures more efficient energy consumption and higher etching efficiency rather than an etching method using laser only.
申请公布号 KR100969473(B1) 申请公布日期 2010.07.14
申请号 KR20080096158 申请日期 2008.09.30
申请人 发明人
分类号 G02F1/13;C03B33/02;H01L21/306 主分类号 G02F1/13
代理机构 代理人
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