发明名称 DICING DIE BONDING FILM HAVING EXCELLENT BURR PROPERTY AND RELIABILITY AND SEMICONDUCTOR DEVICE USING THE SAME
摘要 The present invention relates to a dicing die bonding film employed in a semiconductor packaging process, and a semiconductor device using the same. The dicing die bonding film is configured such that a ratio X/Y of adhesive power X between the wafer and the adhesive layer of the die bonding portion to tacky power Y between the die bonding portion and the tacky layer of the dicing portion is 0.15 to 1, and the adhesive layer of the die bonding portion has a storage modulus of 100 to 1000 MPa at a normal temperature. The dicing die bonding film according to the present invention reduces burr generation in dicing process, and thereby preparing a semiconductor device having excellent reliability without inferiority caused by bad connection reliability due to the burr covering a bonding pad.
申请公布号 EP2205693(A1) 申请公布日期 2010.07.14
申请号 EP20080867582 申请日期 2008.10.28
申请人 LG CHEM, LTD. 发明人 YOO, HYUN JEE;KIM, JANG SOON;HONG, JONG WAN;PARK, HYO SOON;KHO, DONG HAN
分类号 C09J163/00;H01L21/58;H01L21/68 主分类号 C09J163/00
代理机构 代理人
主权项
地址