METHOD OF PRODUCING A DIFFRACTION GRATING ELEMENT,申请号EP20050812973-传众专利搜索

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发明名称	METHOD OF PRODUCING A DIFFRACTION GRATING ELEMENT
摘要
申请公布号	EP1949147(A4)	申请公布日期	2010.07.14
申请号	EP20050812973	申请日期	2005.11.18
申请人	OY NANOCOMP LTD.	发明人	LAAKKONEN, PASI;LEVOLA, TAPANI
分类号	G02B5/18;B81C1/00;G03F7/00	主分类号	G02B5/18
代理机构		代理人
主权项
地址

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