METHOD FOR MAKING FINE PATTERNS USING MASK TEMPLATE

摘要

PURPOSE: A fine pattern forming method using a mask template is provided to implement a circuit which has high conductivity by using an ink where a silver nano particle is dispersed on the solution or solution type organic silver ink as a conductivity ink. CONSTITUTION: A mask template(M) is formed on a substrate(T). A mask template comprises an exposure part(E) which exposes one region of the substrate to the outside and a non-exposure part(A) which is prepared by polymer spread on the other region of the substrate. The conductivity ink(120) is laminated on the non-exposure part by supplying a conductivity ink to the upper side of the mask template. The conductivity ink is laminated on the substrate which is exposed by the exposure part. A heat processing step is included in order to extract a conductivity nano-cluster which is melted or dispersed to the conductivity ink.