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发明名称
TRENCHED SEMICONDUCTOR DEVICES AND THEIR MANUFACTURE
摘要
申请公布号
EP1459386(B1)
申请公布日期
2010.07.14
申请号
EP20020783434
申请日期
2002.11.21
申请人
NXP B.V.
发明人
HIJZEN, ERWIN, A.;IN 'T ZANDT, MICHAEL, A., A.;HUETING, RAYMOND, J., E.
分类号
H01L29/41;H01L29/423;H01L21/28;H01L21/336;H01L29/47;H01L29/49;H01L29/51;H01L29/78;H01L29/872
主分类号
H01L29/41
代理机构
代理人
主权项
地址
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