发明名称 COATING PLANT WITH A CHARGING LOCK AND DEVICE THEREFOR
摘要 <p>The present invention relates to a coating plant, especially a vacuum coating plant, with a charging lock, especially a rectangular vacuum lock for a coating chamber, with a lock aperture (13) having a length of at least 1000 mm that comprises a shutter (6) for closing and opening the lock aperture and a latch (7) to secure the shutter, wherein there are provided means for moving the shutter and the latch from a first open position to a second closed position, and vice versa, these means assuring also that the movements of the shutter (6) and the latch (7) will be coupled with each other in such manner that the shutter (6) will be automatically secured by the latch (7) after the shutter has been closed and will be released again before it is opened.</p>
申请公布号 EP1716268(B1) 申请公布日期 2010.07.14
申请号 EP20040719416 申请日期 2004.03.11
申请人 APPLIED MATERIALS GMBH & CO. KG 发明人 SCHUESSLER, UWE;BANGERT, STEFAN;HENRICH, JUERGEN
分类号 C23C14/56 主分类号 C23C14/56
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