发明名称 Device for transferring a pattern to an object
摘要 A device (4) for transferring a pattern to an object (2). The invention relates especially to production of micro and nanostructures. The device comprises an alignment means (10) arranged in connection with a first contacting means (7) for controlling the motion of the first stamp (8) in a direction perpendicular to the pressing direction (A), and a second contacting means (11) having a second stamp (12) adapted to imprint a second pattern in the second surface (6) of the object (2), and a pressing means (9) further adapted to press the second stamp (12) into contact with the second surface (6) of the object (2) in the pressing direction (A). Hereby is obtained a device of a simple design, which has a high accuracy of the alignment of the stamps in relation to the object.
申请公布号 US7754131(B2) 申请公布日期 2010.07.13
申请号 US20050525034 申请日期 2005.02.17
申请人 OBDUCAT AB 发明人 OLSSON LENNART;ANDERSSON PETER
分类号 B28B11/08;B81C99/00;G03F7/00;G11B5/855;H01L21/027 主分类号 B28B11/08
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