发明名称 Method of making a light emitting element
摘要 A method of making a light emitting element, the light emitting element with a semiconductor layer represented by: AlXInYGa1−X−YN (0≦̸X≦̸1, 0≦̸Y≦̸1, 0≦̸X+Y≦̸1), has the step of wet-etching a surface of the semiconductor layer by using an etching solution to have a roughened surface on the semiconductor layer. The wet-etching is conducted without irradiating the surface of the semiconductor layer with a light with a wavelength region corresponding to energy higher than bandgap energy of the semiconductor layer.
申请公布号 US7754514(B2) 申请公布日期 2010.07.13
申请号 US20070892258 申请日期 2007.08.21
申请人 TOYODA GOSEI CO., LTD. 发明人 YAJIMA TAKAYOSHI;ANDO MASANOBU;UEMURA TOSHIYA;KOJIMA AKIRA;KAGA KOJI
分类号 H01L21/00 主分类号 H01L21/00
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