LAMINATION APPARATUS, HOT PLATEN FOR THE SAME AND PROCESS FOR MANUFACTURING THE HOT PLATEN

摘要

The temperature of hot platen at the operation of laminating can be controlled at a target temperature easily and securely. There is disclosed a lamination apparatus having a superior chamber and an inferior chamber partitioned by a press member, the inferior chamber provided with a hot platen (122), so that a workpiece is placed on the hot platen (122) and, by evacuating the inferior chamber and introducing atmospheric air in the superior chamber, the workpiece heated by the hot platen (122) is pressurized between the hot platen (122) and the press member to thereby attain lamination. The lamination apparatus is characterized in that the hot platen (122) includes a hot platen body (61) provided at its backside with an accommodation groove (63) and a sheath heater (62) embedded in the accommodation groove (63), and that at least either the accommodation groove (63) or the sheath heater (62) is deformed so as to achieve surface contact between the outer peripheral surface of the sheath heater (62) and the inner peripheral surface of the accommodation groove (63).