PLASMA GENERATOR AND PLASMA SPECTROSCOPY INCLUDING THE SAME

摘要

PURPOSE: A plasma generator and a plasma spectroscopic analysis device thereof are provided to improve the reliability of component analysis. CONSTITUTION: A lower plate(110) comprises a fluid storage chamber, a second fluid storage chamber, and a fluid channel. An upper plate(120) is located on the lower plate and includes a first penetrated hole and a second penetrated hole. An electrode(118,119) is located on the lower surface of the lower plate and is located in the first and the second fluid chamber.