PLASMA PROCESSING APPARATUS AND METHOD,申请号KR20060130066-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS AND METHOD
摘要
申请公布号	KR100968990(B1)	申请公布日期	2010.07.09
申请号	KR20060130066	申请日期	2006.12.19
申请人		发明人
分类号	H05H1/46;H05H1/34	主分类号	H05H1/46
代理机构		代理人
主权项
地址

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