| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a deformable mirror which achieves a stable operation without exciting resonance, or changing a deformation amount of a deformable portion. Ž<P>SOLUTION: The deformable mirror system receives information on a maximum deformation amount or a minimum deformation amount and a frequency of a deformable portion 15a, and generates target deformation amount information on the basis of information from a target shape generation table 22 and generates a driving voltage instruction signal having a waveform wherein a high frequency component including a resonance frequency of the deformable portion 15a is reduced, from a target deformation amount on the basis of information from a conversion table 24. A driving signal based on the driving voltage instruction signal is applied to a second electrode 12 of a deformable mirror 1, and an electrostatic force is generated between a first electrode 14 and the second electrode 12 to deform the first electrode 14 and the deformable portion 15a. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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