| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable a film thickness of an adhesive to be computed without depending on dimensions of the refractive index difference between a glass substrate and the adhesive. Ž<P>SOLUTION: A film thickness measuring apparatus 1 is provided, which includes: a heater 12 which is disposed on a base 11 and on which a test substance 4 is mounted; a heating control section 14 for controlling a heating temperature of the test substance 4; a laser displacement gage 13 which is disposed above the test substance 4 and measures an amount of vertical change in the test substance 4 being heated and brought to expand; an input section 15 for inputting the linear expansion coefficient of the adhesive 3 being the test substance 4; and a computing section 16 which computes the film thickness of the adhesive 3 on the basis of the amount of vertical change in the test substance 4 measured by the laser displacement gage 13, the heating temperature and the linear expansion coefficient of the adhesive 3 input by the input section 15. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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