APPARATUS FOR ASSEMBLING SUBSTRATES

摘要

PURPOSE: An apparatus for assembling a substrate through the temperature control of sticky material is provided to facilitate dechucking operation of the substrate through the temperature control of the sticky material. CONSTITUTION: A substrate chuck(150) includes a plurality of sticky materials(151) in order that a substrate is chucked by adhesion. A substrate separator individually controls the temperature of sticky material and the planarity of the substrate chucked in sticky materials. The substrate separation substrate is dechucked from the sticky materials. A temperature adjusting unit(160) individually controls the temperature of sticky materials by controlling power supply to thermoelectric elements according to the sensing value of sensors.