| 摘要 |
<p>Provided are a probe and a probe card, which solve a problem caused by heat generated at the time of replacing and mounting the probe, are easy to handle and make narrower pitch arrangement possible. A method for removing a mounted probe is also provided. A probe (1) has a three-layer structure wherein outer layers are arranged on the both sides of an intermediate layer, which is composed of a mounting section (3) mounted on an electrode of the probe card, an arm section (4) extending from the mounting section, and a leading end section (5) which is arranged on an leading end of the arm section and is brought into contact with an electrode of a subject to be inspected. In the mounting section of the intermediate layer, a portion in contact with the electrode of the probe card protrudes more than the two outer layers. In another invention, by connecting the probe, which has a handling plate (6) arranged thereon and not yet mounted, with the mounted probe, the probe not yet mounted is used for removing the mounted probe. Furthermore, in another invention, after mounting the mounting probe, which has a handling plate arranged thereon, on a probe card substrate, the handling plate is removed.</p> |
