| 摘要 |
<p>PURPOSE: An overlay mark and a method for measuring an overlay using the same are provided to reduce the size of a scribe line by vertically arranging overlay boxes and reducing the horizontal axis size of the overlay boxes. CONSTITUTION: A plurality of overlay boxes includes inner boxes(120) and outer boxes(100) with rectangular shapes. The inner boxes are formed in a scribe line. The inner boxes and the outer boxes are spaced apart by constant intervals. The horizontal axises are shorter than the vertical axises of the inner boxes and the outer boxes. The overlay boxes are arranged in a vertical direction.</p> |
