A FLOOD LIGHT APPARATUS FOR APPEARANCE INSPECTION OF SURFACE

摘要

PURPOSE: A lighting device for a substrate inspection is provided to inspect tiny defects by realizing a planar lighting of high light gathering power. CONSTITUTION: A lighting device for a substrate inspection comprises first lighting units, a transparent plate(110) and a second lighting unit(200). For the first lighting unit, incident angles to objects are differently arranged. The first lighting unit receives and irradiates the light from a light source. The transparent plate is arranged at the leading end of the first lighting unit. The second lighting unit is arranged to face the objects at any arbitrary angle. According to the inspecting method of the objects, at least two of the first lighting units and the second lighting unit alternatively operate and provide lights. The transparent plate comprises a diffuser for diffusing the light provided from the first lighting unit.