| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a grinding wheel which reduces the frequency of dressing of the grinding stones and does not produce scratches on a wafer. <P>SOLUTION: This grinding wheel is detachably attached to the wheel mount of a grinding device having a spindle which is rotatably driven and the wheel mount connected to the end of the spindle. The grinding wheel is equipped with: an annular base having a mount installation part attached to the inner peripheral surface, the outer peripheral surface, and the wheel mount; and a plurality of grinding stones disposed in a ring shape at the free end of the annular base. A recess for adjusting the rotational balance is formed only in the mount installation part of the annular base. <P>COPYRIGHT: (C)2010,JPO&INPIT |
