| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a capacitive-type electromechanical transducer which patterns a protective film provided on a vibrating film, and improves the sensitivity of an element. <P>SOLUTION: The electromechanical transducer has: a first electrode; a vibrating film formed holding a gap between the film and the first electrode; a second electrode formed on the vibrating film; and an insulating protective film formed on a surface of the second electrode. A region without the protective film is formed at least on a part of the surface of the vibrating film. <P>COPYRIGHT: (C)2010,JPO&INPIT |
