| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an improved type of positioning device which is less affected by internal mechanics and to provides a manufacturing method of the device. <P>SOLUTION: The positioning device for positioning an object table 30 is provided with: a frame for supporting the object table 30 in a first direction; and motor units 35 and 36 configured and arranged to exert a first force on the object table 30 from a second direction substantially perpendicular to the first direction and a second force on the object table 30 from a third direction substantially perpendicular to the first direction and the second direction. The motor units 35 and 36 is provided with first components 38 and 39 configured and arranged to cooperate with second components 40 and 41 for generating the first and second forces, and the first components 38, 39 are arranged on the object table 30 such that both the first force and the second force are directed substantially through the center of gravity of the object table 30. <P>COPYRIGHT: (C)2010,JPO&INPIT |
