| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of easily setting a position of an FOV or a size, even when there are a number of measurement points on a sample, as well as an image acquisition condition determining method, using the device. <P>SOLUTION: In the image acquisition condition determining method and the device for realizing the same, for determining fields of view of the charged particle beam device so as to include a plurality of measurement points, determination is made whether each measurement point overlaps with the other at four sides of the field of view; a field is moved so that the measurement point at each side be inside or outside the field; and a position of the field of view after the movement is to be decided as the position of the field of view for the charged particle beam device. Furthermore, a method and a device are also provided in which determination is made whether each measurement point overlaps with the other, as to the four sides, and the size of the FOV is changed up to a range in which the plurality of measurement points are not to overlap one another on each side. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
