| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve follow speed of a control amount of a real object to a set value when measuring and controlling a control amount of a measurement point related to the real object instead of the control amount of the real object hard to be measured. <P>SOLUTION: This controller includes: an estimating polynomial storage part 1 storing an estimating polynomial for estimating a maintenance time TX from online data comprising a temperature rise start point PO, a temperature rise width PH, and an operation amount maintenance value MH; a maintenance time TX estimation value calculation part 4 estimating the maintenance time TX from the inputted online data by use of the estimating polynomial; and an operation amount maintenance control part 5 outputting an operation amount MV with the operation amount maintenance value MH as a target in an initial control period from a temperature rise start time point to a lapse of the maintenance time TX. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
