| 摘要 |
<P>PROBLEM TO BE SOLVED: To determine an airtightness with high precision even when an inner volume of an inspection object is small. Ž<P>SOLUTION: This method for inspecting airtightness includes a space expanding process of bringing a member into intimate contact with an inspection object and coupling a space formed by the member to a space in the inspection object, a storing process of causing a container having airtightness to store the inspection object being in intimate contact with the member, an air injection process of injecting air to the container storing the inspection object, and a determining process of determining airtightness of the inspection object on the basis of the air pressure in the container after the air is injected. In accordance with the method for inspecting airtightness, the volume of the space in the inspection object is increased in a pseudo manner, and thereby determination precision of the airtightness is improved. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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