| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an imprinting device and a method of detecting contamination of a mold which allow easy detection of contamination of the mold. Ž<P>SOLUTION: In the imprinting device, the transparent mold 29 is placed over a liquid resin material 28 which is held on the surface of a substrate 25. The resin material 28 follows a shape of a nano-pattern 31 defined on the surface of the mold 29. An image of the mold 29 is photographed at every time of such imprinting processing. For example, if a foreign substance is adhered to the surface of the mold 29, air is accumulated around the foreign substance between the mold 29 and the resin material 28, and a space is formed around the foreign substance. This space enlarges the foreign substance. Therefore, the foreign substance 32 can be easily detected on the image. The contamination of the mold 29 is easily detected by comparing the image with a reference image. Thereby, the mold 29 with high cleanliness can always be used with the imprinting device. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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