| 发明名称 |
Support structure and exposure apparatus |
| 摘要 |
A support structure supports support objects. The support structure comprises a resonance apparatus that resonates with air vibrations transmitted from the exterior to damp the air vibrations.
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| 申请公布号 |
US2010171022(A1) |
申请公布日期 |
2010.07.08 |
| 申请号 |
US20090458865 |
申请日期 |
2009.07.24 |
| 申请人 |
NIKON CORPORATION |
发明人 |
FUJIMAKI NORIHIKO;KAMIYAMA TAKAHIDE;SAKAMOTO HIDEAKI |
| 分类号 |
F16M13/00 |
主分类号 |
F16M13/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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