| 摘要 |
The invention relates to a cathode spraying module for a vacuum deposition machine for spraying a thin film material onto a substrate (18), including a conveying and guiding path (17) for conveying the substrate (18) through the cathode spraying module (8-13), an anode assembly (29) and a cathode assembly (30), said module (8-13) having an atmosphere individually controlled in terms of pressure, temperature and partial gas pressure, characterised in that said anode assembly is provided substantially at the centre of the module (8-13) and comprises at least one anode (29) arranged as close as possible to the substrate (18), and in that the cathode assembly includes at least one plurality of cathodes (30) including at least one cathode, said plurality of cathodes (30) being remote from the substrate (18). |
