DEVICE FOR TESTING AN INTEGRATED CIRCUIT AND METHOD FOR IMPLEMENTING SAME

摘要

The invention relates to a device (1) for testing an integrated circuit (2), comprising: a platen (3) for receiving the integrated circuit (2) and subjecting it to the test, the platen (3) comprising circuits (4) for powering and operating the integrated circuit (2) and circuits (5) for measuring the operation of the integrated circuit (2) during the test; an irradiation device (6) for subjecting the circuit (2) to a proton bombardment (7), characterised in that said irradiation device comprises a mask (8) with a variable thickness provided between a bombardment access region (9) on the integrated circuit (2) and an implanted area (10) of the integrated circuit (2).