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发明名称
LIFT PIN STRUCTURE AND SUBSTRATE TREATING APPARATUS WITH IT
摘要
申请公布号
KR100968814(B1)
申请公布日期
2010.07.08
申请号
KR20080044534
申请日期
2008.05.14
申请人
发明人
分类号
H01L21/683;H01L21/027;H01L21/08;H01L21/687
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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