| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring instrument capable of precisely measuring a carrier and a posture of a semiconductor wafer stored in the carrier. SOLUTION: The shape measuring instrument includes stages 12 and 20 for supporting a carrier 18 being a measurement target and a measuring part 10 for measuring a shape of the measurement target. The stages 12 and 20 have kinematic coupling pins 20a, 20b and 20c to support the measurement target by kinematic coupling. COPYRIGHT: (C)2010,JPO&INPIT |
