| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a film-formed member, which can quickly and surely form films each having different hardness in each region. SOLUTION: The method for manufacturing the film-formed member includes the sequential steps of: forming a recess portion 2 on the surface 1a of a substrate; forming a stacked film layer C on the surface 1a of the substrate including the recess portion 2; and grinding the whole stacked film layer C so as to be flush. The manufacturing method thereby realizes not only forming the films each having different hardness in each region but also simplifying a manufacturing process by eliminating the need of preparing a special member such as a masking material, enhancing working efficiency by making similar steps so as not to intermittently repeat, and eliminating such possibility as to peel off the film along with an operation like the removal of the masking material. COPYRIGHT: (C)2010,JPO&INPIT |
