| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece inspection device capable of acquiring a more excellent fluidized bed by sufficiently dispersing gas introduced into a storage tank, and by enhancing stirring action to powder in the storage tank. Ž<P>SOLUTION: The workpiece inspection device for inspecting the interior of a workpiece by heating the workpiece in the fluidized bed includes: the storage tank 1 storing the powder for forming the fluidized bed, into which the workpiece which is an inspection object can be input; a heater 2 heating the powder stored in the storage tank; a gas introduction path 3 into which gas is sent from the bottom side of the storage tank 1, capable of stirring the stored powder to form the fluidized bed; and a gas passage body for regulating flow out of the powder into the gas introduction path 3 from inside the storage tank 1, while allowing passage of the gas from the gas introduction path 3 into the storage tank 1. The gas passage body includes porous ceramics 5 having a plurality of fine holes formed inside by coarse particle bonding. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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