| 摘要 |
PROBLEM TO BE SOLVED: To provide a Lamb wave device having less variations in the frequency. SOLUTION: This Lamb wave device 102 includes a piezoelectric thin film 106; an IDT electrode 108 which is provided on a main surface of the piezoelectric thin film 106; and a support structure 122, which supports a laminate 104 of the IDT electrode 108 and the piezoelectric thin film 106, and is formed with a cavity 180 that isolates the laminate 104. The film thickness h of the piezoelectric thin film 106 and the pitch p of a finger 110 of the IDT electrode 108 are selected, such that a Lamb wave is excited at a target frequency which makes dispersibility of a sonic velocity v, with respect to the film thickness h of the piezoelectric thin film 106 small. COPYRIGHT: (C)2010,JPO&INPIT |
