发明名称 SERIES CONTACT UNIT OF TEST HANDLER
摘要 PURPOSE: A serial contact unit of a test handler is provided to reduce the positional modification by fixing two Z axes on the Y-axis of one base plate form. CONSTITUTION: A contact unit(100) of a test handler comprises a body(110), a blade(120), a motor, a Y-axis ball screw, a Y-axis LM guide(210), a base plate(180), and an LM actuator(220). The blade grips electronic elements by inhaling the blade air. The motor transfers the body along the Y-axis LM guide by rotating the Y-axis ball screw. Two Y-axis LM guides are perpendicularly fixed to the base plates. The contact unit has a unified structure of the Z-axis linear motion guide and Z-axis ball screw.
申请公布号 KR20100079414(A) 申请公布日期 2010.07.08
申请号 KR20080137892 申请日期 2008.12.31
申请人 MAYTEC, INC. 发明人 KIM, DEOK SOO;PARK, SANG HYUN;SEO, SANGK UG
分类号 G01R31/26;H01L21/66;H01L21/67 主分类号 G01R31/26
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