发明名称 IMAGE SENSOR AND MANUFACTURING METHOD OF IMAGE SENSOR
摘要 PURPOSE: An image sensor and manufacturing method of the same are provided to minimize the layout area of a capacitor by forming the capacitor through a SOI wafer structure on the same layer as the photo diode into the vertical structure. CONSTITUTION: A first insulation layer(110) is formed on a first substrate(100). A second substrate(120) is formed on the first insulation layer. A first metal layer(132) and a second metal layer(134), passing through the second substrate and the first insulation layer, are formed in a vertical structure. A photo diode and a transistor(140) are formed in the second substrate. More than one of the first and the second substrate includes silicon.
申请公布号 KR20100078719(A) 申请公布日期 2010.07.08
申请号 KR20080137061 申请日期 2008.12.30
申请人 DONGBU HITEK CO., LTD. 发明人 PARK, JEONG SU
分类号 H01L27/146;H01L21/8242 主分类号 H01L27/146
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