| 摘要 |
PURPOSE: A dryer of a substrate is provided to improve the reliability of a drying process by processing the same dryness. CONSTITUTION: A top air knife(10) sprays dry air to the upper side of a transferred substrate(S). A bottom air knife(20) sprays dry air to the bottom side of the substrate. The top air knife and the bottom air knife have a bent shape. An idle roller part(30) comprises an idle roller which has a different size. The idle roller part transfers the substrate to the space between the bottom air knife and the top air knife.
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