APPARATUS AND METHOD FOR VERIFYING LOCATION OF AREA OF INTEREST WITHIN SAMPLE IN IMAGING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method suitable for verifying the location of an area of interest within a sample.

SOLUTION: The imaging system includes an optical system and a stage movable relative to the optical system. A computer server communicates with the imaging system and with a review station. The imaging system is capable of spatially locating a datum mark on the sample and determining a spatial offset value of the mark relative to a nominal position thereof. The coordinate systems of a respective one of the imaging system and the review station can be standardized. The method includes the process of locating a datum mark on the sample, and the process of identifying an area of interest within the sample. The method, further, includes the process of determining the location of the area of interest relative to the mark.

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