| 摘要 |
An apparatus includes a holding mechanism that holds a substrate, a material container where a film-forming material is gasified, a release port for releasing the gasified film-forming material toward the substrate; a material container heating unit for heating the material container, a transport pipe that is detachably linked to the material container by a linking portion and serves to transport the gasified film-forming material from the material container to the release port, a transport pipe heating unit for heating a remaining zone of the transport pipe other than a portion in a vicinity of the linking portion, and a linking portion heating unit that is disposed independently from the transport pipe heating unit and serves for heating the portion of the transport pipe in the vicinity of the linking portion.
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