APPARATUS AND METHOD FOR SUPPLYING SLURRY FOR A SEMICONDUCTOR

摘要

The present invention provides an apparatus for supplying a slurry for a semiconductor, comprising: a filter for removing particles larger than a predetermined size from the slurry; an air injector connected to the filter to backwash the filter by the compressed air injected therein; a slurry recovery tank connected to the filter to store the unfiltered slurry; and a crusher arranged in the slurry recovery tank to crush the unfiltered slurry.