| 摘要 |
PURPOSE: A liquid chemical applying apparatus is provided to uniformly apply a liquid chemical with a lower flow rate by forming a film of the liquid chemical using surface tension and to reduce the acceleration of a jet stream. CONSTITUTION: A liquid chemical applying apparatus sprays a liquid chemical supplied from a slit(30) in between an upper plate(10) and a lower plate(20) to the surface of an object. The lower plate is more protruded from the apparatus than the upper plate. A droplet producing unit(21) is formed at the end of the lower plate. The droplet producing unit includes a size limiting unit(22) limiting the size of droplets produced from the droplet producing unit. |
