| 摘要 |
PROBLEM TO BE SOLVED: To enable a probe card to be heated effectively at a prescribed temperature. SOLUTION: A method for inspecting an integrated circuit is provided, which includes: a first step of making at least one determination chosen from a group containing whether or not a chuck top accommodating the integrated circuit exists near the probe card which transmits and receives an electric signal from/to the integrated circuit, whether or not the integrated circuit is in its inspection operation, and whether or not the probe card is at the prescribed temperature; and a second step of adjusting a heating power which is applied to a heating element contained in the probe card, in accordance with a determination result of the first step. COPYRIGHT: (C)2010,JPO&INPIT
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