| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of wirings and the number of switching elements in a heater, a sensor, and the like. SOLUTION: Nine of a first to ninth heaters 6-1 to 6-9 for heating a hot plate 10 are connected into a matrix form between three of first power lines L1-1 to L1-3 in a row direction and three of second power lines L2-1 to L2-3 in a column direction. The first power lines L1-1 to L1-3 are connected to one end of a power supply through three switching elements, respectively. The second power lines L2-1 to L2-3 are connected to the other end of the power supply through three switching elements, respectively. On-off control is performed to the switching elements to select the heater to be driven. Therefore, the number of power lines and the number of switching elements are decreased compared with a conventional technique in which the heaters are separately wired. COPYRIGHT: (C)2010,JPO&INPIT
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