| 摘要 |
PURPOSE: A device for inspecting a substrate is provided to effectively eliminate generated condensation water by inspecting the defect of a substrate using steam. CONSTITUTION: A device for inspecting a substrate comprises an outer frame(156), a substrate holder, a light source(162), a steam supplying part(300), and a condensation water eliminating part. A vacuum line with multiple vacuum ports(202) is arranged in the substrate holder. The light source supplies light to a substrate(G). The steam supplying part supplies steam to the substrate to confirm defects. The condensation water eliminating part is installed in the steam supplying part and prevents condensation water from being transferred to the substrate.
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