| 摘要 |
PURPOSE: A controller and an interface device of a cryo valve are provided to rapidly execute the replacement of a cryo pump by applying a network adapter when a network is connected. CONSTITUTION: A first and a second controller side cable are connected to a controller. A first and a second valve side cable are connected to a first cryo valve. A third and a fourth valve side cable are connected to the second cryo valve. A first or a third network adapter executes the interconnection between the first controller side cable and the first valve side cable, the interconnection between the second valve side cable and the third valve side cable, and the interconnection between the fourth valve side cable and the second controller side cable. Each of the first or the third network adapter includes a first and a second connection part(131,132).
|
