| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a vacuum adsorption nozzle which is hardly worn and durable against a shock load in adsorption, can surely adsorb an adsorbed object without causing adsorption deviation and a fall caused by slippage, and can perform high-speed mounting and high density so that the adsorbed object is rapidly mounted to a circuit board and release the object, in consideration of the fact that a vacuum adsorption nozzle is downsized in order to respond to the downsizing, weight reduction and multifunctionality of the adsorbed object to be mounted and enable high-density mounting. <P>SOLUTION: In the vacuum adsorption nozzle 1 with an adsorbing surface 2 formed of ceramic for vacuum-adsorbing the adsorbed object and an adsorbing hole 3 at the adsorbing surface 2, the ceramic of the adsorbing surface 2 contains a main component configuring the ceramic and a second component of crystal grains having an average crystal grain size larger than the average crystal grain size of crystal grains of the main component, and the crystal grains of the main component further protrude than the crystal grains of the second component on the adsorbing surface 2. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
