| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid injection head capable of obtaining sufficiently a restraint effect against electric breakdown caused by deposition and intrusion of moisture onto/into a piezoelectric layer, in the liquid injection head having a substrate formed with a pressure generating chamber communicated with a nozzle opening, and a piezoelectric element including the piezoelectric layer, a lower electrode film formed in a lower side of the piezoelectric layer, and an upper electrode film formed in an upper side of the piezoelectric layer. SOLUTION: The upper electrode film 80 is provided to cover the substantially whole areas of an upper face and side faces of the piezoelectric layer 70 in an area opposed to each pressure generating chamber 12. Each side face 71 of a thick wall thickness part 70a constituting the piezoelectric layer 70 forms a sloped face. An inclination angle thereof is within a range of 5-75°with respect to a top view direction of a flow channel forming substrate 10, i.e. a surface of an insulator film 55. COPYRIGHT: (C)2010,JPO&INPIT
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