| 摘要 |
PROBLEM TO BE SOLVED: To intermittently supply coating liquid in an excellent responsiveness in accordance with its discharge using state in an intermittent coating while continuously operating a pump 2 for liquid supply. SOLUTION: A capacity variable liquid accumulation part 10 is provided in a liquid supply path 5 between the pump 2 and a coating head 3, and the capacity of the liquid accumulation part 10 is changed corresponding to the discharge using state in the coating head 3 and a pump discharge amount. When not performing coating, by increasing the capacity, a liquid amount equivalent to the discharge amount from the pump 2 is absorbed in the liquid accumulation part 10 and the supply of the coating liquid to the coating head is stopped. When performing coating, by reducing the capacity of the liquid accumulation part 10, the coating liquid accumulated in the liquid accumulation part 10 is returned to the liquid supply path 5 by a fixed amount each and supplied to the coating head 3 together with the discharge liquid from the pump 2. COPYRIGHT: (C)2010,JPO&INPIT
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