发明名称 APPARATUS FOR MEASUREMENT OF THREE-DIMENSIONAL SHAPE
摘要 A 3D shape measuring apparatus is disclosed, which is capable of simultaneously obtaining interference fringes of the lowest point and the highest point, by comprising a reflection path controller that generates a reference plane reflection path equal to a reflection path from a lowest point, and a reference plane reflection path equal to a reflection path from a highest point, the lowest and the highest points of a measured object having a height difference.
申请公布号 US2010171963(A1) 申请公布日期 2010.07.08
申请号 US20080601973 申请日期 2008.05.28
申请人 INTEKPLUS CO., LTD 发明人 LEE SANG-YUN;KANG MIN-GU;LIM SSANG-GUN
分类号 G01B11/25 主分类号 G01B11/25
代理机构 代理人
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