<p>The invention relates to an apparatus for treating an object using a plasma process. The apparatus comprises a plasma reactor including a metal cylinder covered by a dielectric layer. Further, the apparatus comprises an electrode structure arranged radially outside the metal cylinder for generating the plasma process. The apparatus also comprises a supporting structure for locating the object to be treated at a pre-defined distance from the plasma reactor.</p>
申请公布号
WO2010077138(A1)
申请公布日期
2010.07.08
申请号
WO2009NL50810
申请日期
2009.12.29
申请人
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO;SIMOR, MARCEL;BLOM, PAUL, PETRUS, MARIA