| 摘要 |
PURPOSE: An apparatus for assembling substrates is provided to remove the moisture flowing when a substrate is inserted into the inside of a chamber. CONSTITUTION: A first chamber(110) supports a first substrate(10), and a second chamber(120) supports a second substrate(20) to face the first substrate. A chamber moving unit(190) moves the first chamber and/or the second chamber toward the rest one of the chamber. Through the movement, the first and second substrates are attached to each other. A heating unit removes the moisture flowing to the inside of the chamber by heating the first and second chambers. |
